Will Conley
Principle Engr
SPIE Involvement:
Symposium Chair | Conference Program Committee | Author | Editor
Area of Expertise:
Photoresist , Masks , DFM , Optical Lithography , Process , OPC
Websites:
Profile Summary

Fellow Member
Publications (140)

Proceedings Article | 25 March 2020 Presentation
Proc. SPIE. 11327, Optical Microlithography XXXIII

Proceedings Article | 18 March 2019 Presentation
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Light sources, Deep ultraviolet, Scanners, Control systems, Source mask optimization, Critical dimension metrology, Semiconducting wafers, Yield improvement

Proceedings Article | 20 March 2018 Presentation
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Light sources, Deep ultraviolet, Scanners, Manufacturing, Semiconducting wafers, Yield improvement

Proceedings Article | 20 March 2018 Presentation + Paper
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Temporal coherence, Lithography, Light sources, Metrology, Optical lithography, Etching, Line width roughness, Line edge roughness, Semiconducting wafers

Proceedings Article | 20 March 2018 Presentation
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Light sources, Logic, Optical lithography, Deep ultraviolet, 3D metrology, Photomasks, Immersion lithography

Showing 5 of 140 publications
Proceedings Volume Editor (6)

SPIE Conference Volume | 26 April 2013

SPIE Conference Volume | 25 April 2012

SPIE Conference Volume | 22 March 2011

SPIE Conference Volume | 3 March 2010

SPIE Conference Volume | 11 June 1999

Showing 5 of 6 publications
Conference Committee Involvement (21)
Optical Lithography XXXIV
23 February 2021 | San Jose, California, United States
Optical Microlithography XXXIII
25 February 2020 | San Jose, California, United States
SPIE Advanced Lithography
23 February 2020 | San Jose, United States
Optical Microlithography XXXII
26 February 2019 | San Jose, California, United States
SPIE Advanced Lithography
24 February 2019 | San Jose, United States
Showing 5 of 21 Conference Committees
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