Mr. William J. Simmons Profile

William J. Simmons

Product Engineer at Brewer Science Inc

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Publications (3)

Proceedings Article | 12 June 2003 Paper

Developer soluble organic BARCs for KrF lithography

Chris Cox, Darron Dippel, Craig Ghelli, Pasquale Valerio, William Simmons, Alice Guerrero

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.483708

KEYWORDS: Photoresist developing, Photoresist materials, Etching, Plasma etching, Semiconducting wafers, Lithography, Plasma, Optical lithography, Scanning electron microscopy, Dry etching

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Proceedings Article | 2 June 2000 Paper

Advancements in organic antireflective coatings for dual-damascene processes

Shreeram Deshpande, Xie Shao, James Lamb, Nickolas Brakensiek, Joe Johnson, Xiaoming Wu, Gu Xu, William Simmons

Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386539

KEYWORDS: Etching, Optical lithography, Metals, Photoresist processing, Copper, Dielectrics, Critical dimension metrology, Photomasks, Semiconductor manufacturing, Semiconductors

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Proceedings Article | 14 June 1999 Paper

Broadband planarizing antireflective coating for i-line, DUV, and 193-nm microlithographic applications

Xie Shao, James Lamb, James Claypool, William Simmons, Earnest Murphy

Proceedings Volume 3677, (1999) https://doi.org/10.1117/12.350877

KEYWORDS: Reflectivity, Etching, Critical dimension metrology, Photoresist materials, Polymers, Prototyping, Coating, Deep ultraviolet, Lithography, Oxides

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