Mr. William J. Simmons Profile

William J. Simmons

Product Engineer at Brewer Science Inc

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Publications (3)

Proceedings Article | 12 June 2003 Paper

Developer soluble organic BARCs for KrF lithography

Chris Cox, Darron Dippel, Craig Ghelli, Pasquale Valerio, William Simmons, Alice Guerrero

Proc. SPIE. 5039, Advances in Resist Technology and Processing XX

KEYWORDS: Lithography, Optical lithography, Etching, Dry etching, Scanning electron microscopy, Photoresist materials, Plasma etching, Semiconducting wafers, Photoresist developing, Plasma

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Proceedings Article | 2 June 2000 Paper

Advancements in organic antireflective coatings for dual-damascene processes

Shreeram Deshpande, Xie Shao, James Lamb, Nickolas Brakensiek, Joe Johnson, Xiaoming Wu, Gu Xu, William Simmons

Proc. SPIE. 3998, Metrology, Inspection, and Process Control for Microlithography XIV

KEYWORDS: Semiconductors, Optical lithography, Etching, Metals, Copper, Dielectrics, Photomasks, Semiconductor manufacturing, Critical dimension metrology, Photoresist processing

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Proceedings Article | 14 June 1999 Paper

Broadband planarizing antireflective coating for i-line, DUV, and 193-nm microlithographic applications

Xie Shao, James Lamb, James Claypool, William Simmons, Earnest Murphy

Proc. SPIE. 3677, Metrology, Inspection, and Process Control for Microlithography XIII

KEYWORDS: Oxides, Lithography, Deep ultraviolet, Etching, Polymers, Coating, Reflectivity, Photoresist materials, Critical dimension metrology, Prototyping

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