Winfried M. Kaiser
Senior Vice President / Carl Zeiss Fellow at Carl Zeiss SMT GmbH
SPIE Involvement:
Conference Program Committee | Author
Publications (28)

Proceedings Article | 7 January 2021 Presentation + Paper
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Extreme ultraviolet lithography, High volume manufacturing, Scanners, Lens design, Sensors, Printing, Optical lithography, Device simulation, Projection systems, Buildings

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Light sources and illumination, Lithographic illumination, Mirrors, Metrology, EUV optics, Projection systems, Optics manufacturing, Lithography, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Photomasks, Line width roughness, Semiconducting wafers, Extreme ultraviolet lithography, Particles, Scanners, Extreme ultraviolet, Photoresist materials, Optics manufacturing, Stochastic processes

Proceedings Article | 16 October 2019 Presentation
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Extreme ultraviolet lithography, Photomasks, High volume manufacturing, Scanners, Lens design, Sensors, Thermography, Pellicles

Proceedings Article | 16 October 2019 Presentation
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Extreme ultraviolet lithography, EUV optics, Scanners, Imaging systems, Projection systems, Lithographic illumination, Optical design, Double patterning technology, Extreme ultraviolet, Mirrors

Showing 5 of 28 publications
Proceedings Volume Editor (1)

SPIE Conference Volume | 8 November 2000

Conference Committee Involvement (6)
International Conference on Extreme Ultraviolet Lithography 2021
26 September 2021 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2020
21 September 2020 | Online Only, California, United States
International Conference on Extreme Ultraviolet Lithography 2019
16 September 2019 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2018
17 September 2018 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography
11 September 2017 | Monterey, California, United States
Showing 5 of 6 Conference Committees
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