Mr. Witold Rzodkiewicz Profile

Witold Rzodkiewicz

at Institute of Microelectronics and Photonics

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Publications (2)

Proceedings Article | 1 April 2003 Paper

Effects of stress annealing on the index of refraction of SiO2 layers in MOS devices

Witold Rzodkiewicz, Henryk Przewlocki

Proceedings Volume 5064, (2003) https://doi.org/10.1117/12.501538

KEYWORDS: Annealing, Oxides, Nitrogen, Refractive index, Semiconducting wafers, Silica, Molybdenum, Silicon, Refraction, Interfaces

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Proceedings Article | 10 August 2001 Paper

Spectroscopic ellipsometry investigation of influence of high-pressure high-temperature process on optical properties of SiO2-Si structures

Witold Rzodkiewicz, Andrzej Kudla, Andrzej Misiuk, Stanislaw Lasisz

Proceedings Volume 4517, (2001) https://doi.org/10.1117/12.435963

KEYWORDS: Refractive index, Interfaces, Annealing, Surface roughness, Scanning electron microscopy, Data modeling, Silicon, Spectroscopic ellipsometry, Optical properties, Spectroscopy

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