Wolf Staud
Sr. Product Marketing Manager at Applied Materials South East Asia Pte Ltd
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 26 May 2010 Paper
Proc. SPIE. 7748, Photomask and Next-Generation Lithography Mask Technology XVII
KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Image restoration, Image resolution, Airborne remote sensing, Scanners, Lithography, Defect inspection, Imaging systems

Proceedings Article | 2 April 2010 Paper
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Image resolution, Lithography, Airborne remote sensing, Wafer-level optics, Optical proximity correction, Scanners, Data modeling

Proceedings Article | 15 May 2007 Paper
Proc. SPIE. 6607, Photomask and Next-Generation Lithography Mask Technology XIV
KEYWORDS: Etching, Double patterning technology, Lithography, Optical lithography, Error analysis, Image processing, Statistical analysis, Visualization, Image registration, Modulation transfer functions

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Double patterning technology, Photomasks, Optical proximity correction, Semiconducting wafers, Lithography, Neodymium, Logic, Optical lithography, Scanners, Resolution enhancement technologies

Proceedings Article | 20 May 2006 Paper
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Photomasks, Double patterning technology, Optical proximity correction, Printing, Semiconducting wafers, Critical dimension metrology, Lithography, Feature extraction, 3D modeling, Manufacturing

Showing 5 of 20 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 6 December 2004

SPIE Conference Volume | 17 December 2003

Conference Committee Involvement (15)
Photomask Technology 2014
16 September 2014 | Monterey, California, United States
SPIE Photomask Technology
10 September 2013 | Monterey, California, United States
Photomask Technology
15 September 2009 | Monterey, California, United States
Photomask Technology
7 October 2008 | Monterey, California, United States
Photomask Technology
18 September 2007 | Monterey, California, United States
Showing 5 of 15 Conference Committees
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top