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Wonjin Kim
at Hanyang Univ
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Publications (2)
Proceedings Article | 14 April 2023 Poster
Impact of MoSi2 crystal structure on nano-membrane emissivity
Proceedings Volume PC12494, PC124940L (2023) https://doi.org/10.1117/12.2658601
KEYWORDS: Crystals, Pellicles, Extreme ultraviolet, Annealing, Extreme ultraviolet lithography, Composites, Wet etching, Transmittance, Thermal modeling, Temperature metrology
Proceedings Article | 13 June 2022 Poster
Impact of thermal expansion coefficient on the local tilt angle of extreme ultraviolet pellicle
Chang Soo Kim, Jung Hwan Kim, Seong Ju Wi, Ha Neul Kim, Young Woo Kang, Won Jin Kim, Jinho Ahn
Proceedings Volume 12051, 120510S (2022) https://doi.org/10.1117/12.2614355
KEYWORDS: Pellicles, Extreme ultraviolet, Numerical analysis, Finite element methods, Computer simulations
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