Prof. Wooshik Kim Profile

Prof. Wooshik Kim

at Sejong Univ

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Publications (2)

SPIE Journal Paper | 14 October 2016 Open Access

Accurate characterization of mask defects by combination of phase retrieval and deterministic approach

Thibault Leportier, Min-Chul Park, Wooshik Kim, Jin Dong Song

OE, Vol. 55, Issue 10, 103105, (October 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.10.103105

KEYWORDS: Phase retrieval, Diffraction, Defect detection, Photomasks, Fourier transforms, Inspection, Imaging systems, Extreme ultraviolet lithography, Reconstruction algorithms, Optical engineering

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Proceedings Article | 1 June 2016 Paper

Accurate characterization of mask defects by combination of phase retrieval and deterministic approach

Min-Chul Park, Thibault Leportier, Wooshik Kim, Jindong Song

Proceedings Volume 9867, 986712 (2016) https://doi.org/10.1117/12.2224712

KEYWORDS: Photomasks, Phase retrieval, Extreme ultraviolet lithography, Inspection, Diffraction, Algorithm development, 3D image processing, Coherence imaging, Defect inspection, Phase measurement, Defect detection, Fourier transforms, Imaging systems

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