KEYWORDS: Polymethylmethacrylate, Gas lasers, Laser ablation, Microfluidics, Surface roughness, Chemical analysis, Liquids, Scanning electron microscopy
CO2 lasers often produce PMMA microchannels, as non-metallic materials have a strong absorption capability for mid and far infrared. Triangular cross-section microchannels have been fabricated by conventional methods, due to the Gaussian distribution of laser intensity. It cannot meet the requirements of microfluidic chips sometimes. In this paper, a multi-pass translational method is proposed, which based on the lateral heat-affected zone (HAZ) formed by single ablation, and multiple ablation with its width. This way not only produces a clean bottom like the static multi-pass method, but can modify the cross-sectional topography to produce a clean trapezoidal microchannel. Next, we evaluated the topography of microchannel by introducing the parameter "S", analyzing the variations in surface roughness and HAZ. All these indicate that the multi-pass translational method is a rapid and economic way of fabricating high quality trapezoidal microchannel on PMMA-based microfluidic devices.
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