Ms. Xi Chen Profile

Xi Chen

at Beijing Univ of Posts and Telecommunications

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Publications (1)

Proceedings Article | 26 September 2019 Paper

Impact of EUV multilayer mask defects on imaging performance and its correction methods

Yunyun Hao, Lisong Dong, Xi Chen, Rui Chen, Taian Fan, Yayi Wei, Tianchun Ye

Proceedings Volume 11147, 111471B (2019) https://doi.org/10.1117/12.2536707

KEYWORDS: Photomasks, Extreme ultraviolet, Lithography, Deep ultraviolet, Reflectivity, Manufacturing, Polishing, Plasma etching, Optical proximity correction, Extreme ultraviolet lithography

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