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Xiang Liu
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Publications (1)
Proceedings Article | 24 August 2009 Paper
MEMS compressed tunable grating
Xiang Liu, Tie Li, Anjie Ming, Yanxiang Liu, Ping Zhou, Yuelin Wang
Proceedings Volume 7381, 73812L (2009) https://doi.org/10.1117/12.835517
KEYWORDS: Microelectromechanical systems, Actuators, Diffraction gratings, Laser optics, Diffraction, Silicon, Semiconducting wafers, Telecommunications, Deep reactive ion etching, Laser spectroscopy
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