With the increasing adoption of LIDAR technology in recent years, the beam scanning system, an integral component of LIDAR, has garnered significant attention. The beam scanning system represents a laser scanning technology capable of achieving rapid, highly precise, and stable performance. However, conventional mechanical beam scanning systems, which are widely used, suffer from large size and susceptibility to wear and tear. Similarly, solid-state beam scanning systems often encounter issues such as limited scanning angles and slow scanning speeds. To address the shortcomings of existing solutions, we propose a novel solid-state beam scanning system based on Metasurface-integrated VCSEL as the laser light source in this paper. By redirecting the outgoing laser light from the Metasurface-integrated VCSELs, we generate a largearea spatial point cloud in space, thereby facilitating beam scanning tasks. Additionally, we validate the efficacy of our proposed system through experimentation using an FPGA demo board to simulate the VCSEL driver chip. This experimental verification successfully demonstrates the real-time dynamic beam scanning capabilities of our proposed scheme.
Vertical cavity surface emitting laser (VCSEL) is an excellent laser light source with small volume, low threshold, easy integration, and array arrangement, and has been widely used in sensing, communication, medical instruments, processing, and other fields since its birth. However, the application of VCSELs in some fields is limited, such as laser processing, projection and display, and medical equipment, because the laser light is a Gaussian distribution with concentrated energy. TopHat beams have received extensive attention due to their uniform distribution of energy over the spot area. In this paper, we tightly combine the metasurface with the VCSEL by means of on-chip integration and realize a metasurface-integrated VCSEL (MS-VCSEL) that can directly output the TopHat beam. The standard deviation is used to calculate the test results, and the uniformity of the spot was 70.5%. This work has important implications for the design of chip-scale optical systems, making it possible for laser chips with TopHat beams as light sources to be applied in future products.
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