Integrated Optical Ring Resonator structures fabricated on SOI (silicon-on-insulator) based on MEMS (micro electronic
mechanical system) present provide feasibility for highly compact and low cost integrated optical devices. The SOI
Integrated Optical Micro Ring Resonator was designed and fabricated in this paper. We designed bending radius of
15μm optical ring resonator. Most important we designed vertical grating coupler for increasing the coupling efficiency
between the single mode fiber and waveguide. We get obvious coupling of SOI Integrated Optical Micro Ring Resonator
to single mode waveguide in experiments. Without any optimization processing the quality factor(Q) of micro ring
resonator is demonstrated as high as 1.5×104 -1.93×104.
We present a high-efficiency broadband grating coupler for coupling between silicon-on-insulator (SOI)waveguides and
optical fibers. The grating is only 14 μm long and 11 μm wide, and the size of the grooves is optimized numerically.
For TE polarization the coupling loss to single-mode fiber is below 1 dB over a 35-nm wavelength range when using
SOI with a two-pair bottom reflector. We used Focused Ion Beam (FIB) processing methods to fabricate the grating
structure.The tolerances to fabrication errors are also calculated. The diffractive grating structures are designed to be
inherently very directional by adding a silicon overlay before grating definition. 57% coupling efficiency at a wavelength
of 1.54 μm is experimentally demonstrated on devices fabricated used FIB. By optimizing the grating parameters, we
theoretically show that 83% grating output coupling efficiency can be obtained for a uniform grating structure.