Mr. Xiaojie Xue Profile

Xiaojie Xue

at Univ of Illinois

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 16 January 2003 Paper

Surface characterization and adhesion analysis for polysilicon surface micromachined flaps

Xiaojie Xue, Leslie Phinney

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.472729

KEYWORDS: Silicon, Surface roughness, Microelectromechanical systems, Capillaries, Atomic force microscopy, Scanning electron microscopy, Atomic force microscope, HF etching, Etching, Humidity

Read Abstract +

Due to the relatively high compliance, large surface-to-volume ratio, and small separation distances, micromachined polycrystalline silicon (polysilicon) structures are susceptible to high adhesion forces including van der Waals, electrostatic, and capillary forces. Since these forces depend on the surface separation distance, it is essential to understand the microtribological properties, especially the surface roughness. In this study, four types of polysilicon microhinged flaps were designed to characterize the surfaces. The flaps enable access to both the top and bottom surfaces of the structural polysilicon layers. Multiple locations are scanned for each surface type using a Digital Instruments 3100 atomic force microscope (AFM). The results indicate that the top surface is much rougher than the bottom surface for structural layers and the roughness is influenced by the adjacent layers. Since the base polysilicon layer (poly0) is six times rougher than a base silicon nitride layer, depositing the MEMS devices on the poly0 layer rather than directly on silicon nitride will reduce adhesion. An adhesion model was used to analyze the effect of roughness parameters on stiction force between structural layers and substrate. Since the tip condition impacts the accuracy of AFM measurement, a wear test of silicon tips was also performed.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years