Ion thermal diffusion theory was applied to analyze the influence on numerical aperture and focal length of planar square
aperture microlens array (PMLA). Moreover, numerical aperture and focal length with different ion-exchanging time but
the same size of mask aperture were measured experimentally. Then, we measured the longitudinal and transverse
spherical aberration by the method of parallel light incidence and emergent light pupil and improved the aberration of
square-aperture PMLA by annealing treatment. Experiment results show that the spherical aberration is decreased
obviously after annealing process. Meanwhile, imaging resolution is also improved more greatly. PMLA optical system
with continuously adjustable focal length was proposed, which was made up of two pieces of square aperture PMLA and
an aspherical lens and focal length can be adjusted continuously just by precisely adjusting the distance between the two
pieces of square aperture PMLA.
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