Dr. Xiaoyuan Qi Profile

Dr. Xiaoyuan Qi

at Siemens EDA

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Publications (2)

Proceedings Article | 13 November 2024 Presentation

Monotonic machine learning for lithography retargeting layer generation by leveraging contour-based metrology

Yuansheng Ma, Haizhou Yin, Le Hong, Xuefeng Zeng, Xiaomei Li, Hongming Zhang, Jeongmi Lee, Xiaoyuan Qi, Neal Lafferty, Germain Fenger, George Lippincott, Jiechang Hou, Abdulrazaq Adams, Xima Zhang, Yuyang Sun, Danping Peng, Renyang Meng, Werner Gillijns

Proceedings Volume 13216, 132161V (2024) https://doi.org/10.1117/12.3034720

KEYWORDS: Etching, Machine learning, Metrology, Modeling, Semiconductor manufacturing, Data modeling, Contour extraction, Simulations, Scanning electron microscopy, Image processing

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Proceedings Article | 10 April 2024 Presentation

Machine learning (ML) based SEM contour extraction accelerated by GPU for etch modeling application

Yuansheng Ma, Xuefeng Zeng, Yunxiang Wang, Haizhou Yin, Xiaoyuan Qi, Shibing Wang, Le Hong

Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3012442

KEYWORDS: Scanning electron microscopy, Contour extraction, Modeling, Etching, Machine learning, Metrology, Data modeling, Contour modeling, Semiconductors, Industry

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