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Xiaoyue Yang
at Tongji Univ
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Publications (1)
Proceedings Article | 16 December 2013 Paper
Structural characterization of multilayer using the analysis combining GIXRF with GIXRR method
Xiaoyue Yang, Wenbin Li, Jingtao Zhu, Xiaolong Li, Zhanshan Wang
Proceedings Volume 9068, 90680X (2013) https://doi.org/10.1117/12.2053960
KEYWORDS: Luminescence, X-ray fluorescence spectroscopy, X-rays, Grazing incidence, Nickel, Scattering, Compton scattering, Reflectivity, Silicon, Interfaces
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