Dr. Xin Li Profile

Dr. Xin Li

at KLA China

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

A novel method of overlay variation study for 3D NAND channel hole

Leeming Tu, Haydn Zhou, Erik Xiao, Jin Zhu, Cynthia Li, Ningqi Zhu, Xin Li, Jason Pei, Miao Bing, Seddy Chu, Kevin Huang, Bob Dong

Proceedings Volume 11611, 116112W (2021) https://doi.org/10.1117/12.2583760

KEYWORDS: Etching, Statistical analysis, Semiconducting wafers, Overlay metrology, Process control, Photomasks, Optical alignment, Opacity, Metrology, Feedback control

Read Abstract +

Proceedings Article | 24 March 2020 Presentation + Paper

Advanced process control loop for SAQP pitch walk with combined lithography, deposition and etch actuators

Huan Ren, Antonio Mani, Sixiao Han, Xin Li, Xuemei Chen, Dieter Van Den Heuvel

Proceedings Volume 11325, 1132523 (2020) https://doi.org/10.1117/12.2552911

KEYWORDS: Etching, Semiconducting wafers, Lithography, Plasma etching, Critical dimension metrology, Process control, Actuators, Optical lithography, Scanning electron microscopy

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years