Mr. Xin Tao Profile

Xin Tao

at China Academic of Engineering Physics

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Proceedings Article | 10 October 2020 Presentation + Paper

Virtual interferometer based on vector formula of ray tracing

Yang Liu, Yao Hu, Xin Tao, Yifan Huang, Qun Hao

Proceedings Volume 11548, 115480U (2020) https://doi.org/10.1117/12.2573850

KEYWORDS: Interferometers, Ray tracing, Phase shifts, Zemax, Telecommunications, Aspheric lenses, Algorithm development, Visualization, Software development

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The digital Moiré interferometer technique (DMIT) based on partial compensation principle is an effective approach for aspheric and freeform measurement. Besides a real interferometer, virtual interferometer, as a part of DMIT, plays an important role in the phase-shifting and alignment. The virtual interferometer based on the ray tracing, by creating a light path which is exactly the same with the actual interferometer, can obtain a simulated virtual interferogram for the phaseshifting and alignment. Generally, the ray tracing is simulated by Zemax software. However, due to the limitation of software, a communication delay between Zemax and other modules will influence the efficiency and response time of the whole system. So, how to realize ray tracing in an efficient way is still worth exploring. In this paper, we present a method for tracing ray to improve the efficiency. By using the vector formula of ray tracing, we can improve the calculation accuracy and shorten the calculation time of ray tracing, which can be used in most optical systems. Furthermore, we implement the algorithm of virtual interferometer on the basis of Visual C++, which is the software development platform of DMIT. In this way, we can integrate the virtual interferometer into the software system of DMIT, and then reduce the calling time between modules. Several simulation results are present to validate the feasibility of our method.

Proceedings Article | 28 February 2017 Paper

Aspheric surface measurement using capacitive probes

Xin Tao, Daocheng Yuan, Shaobo Li

Proceedings Volume 10256, 102564X (2017) https://doi.org/10.1117/12.2260661

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With the application of aspheres in optical fields, high precision and high efficiency aspheric surface metrology becomes a hot research topic. We describe a novel method of non-contact measurement of aspheric surface with capacitive probe. Taking an eccentric spherical surface as the object of study, the averaging effect of capacitive probe measurement and the influence of tilting the capacitive probe on the measurement results are investigated. By comparing measurement results from simultaneous measurement of the capacitive probe and contact probe of roundness instrument, this paper indicates the feasibility of using capacitive probes to test aspheric surface and proposes the compensation method of measurement error caused by averaging effect and the tilting of the capacitive probe.

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