Dr. Xinhui Niu
Director of Science
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 24 May 2004 Paper
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536057
KEYWORDS: Metrology, Scatterometry, Semiconducting wafers, Lithography, Critical dimension metrology, Process control, Scanning electron microscopy, Oxides, Finite element methods, 3D metrology

Proceedings Article | 2 June 2003 Paper
Joerg Bischoff, Xinhui Niu, Nickhil Jakatdar
Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.483686
KEYWORDS: Metrology, Diffraction, Scatterometry, 3D metrology, Optical lithography, Lithography, Inspection, Scattering, Differential equations, Radio propagation

Proceedings Article | 2 June 2000 Paper
Junwei Bao, Xinhui Niu, Nickhil Jakatdar, Costas Spanos, Joseph Bendik
Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386454
KEYWORDS: Metals, Scanning electron microscopy, Metrology, Spectroscopy, Diffraction gratings, Diffraction, Tin, Light scattering, Scatterometry, Critical dimension metrology

Proceedings Article | 2 June 2000 Paper
Xinhui Niu, Nickhil Jakatdar, Sanjay Yedur, Bhanwar Singh
Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386449
KEYWORDS: Spectroscopy, Metrology, Diffraction, Lithography, Diffraction gratings, Etching, Thin films, Spectroscopes, Deep ultraviolet, Atomic force microscopy

Proceedings Article | 2 June 2000 Paper
Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386464
KEYWORDS: Fourier transforms, Metrology, Lithography, Diffraction gratings, Diffraction, Thin films, Spectroscopy, Reflectance spectroscopy, Curium, Reflectometry

Showing 5 of 14 publications
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