Prof. Xinmin Shen Profile

Prof. Xinmin Shen

Lecturer at PLA University of Science and Technology

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Author

Publications (4)

Proceedings Article | 28 October 2016 Paper

Research on optimal process parameters in thermally oxidation-assisted polishing of reaction-sintered silicon carbide

Xinmin Shen, Kazuya Yamamura, Xiaonan Zhang, Xiangpo Zhang, Dong Wang, Kang Peng

Proceedings Volume 9683, 96832B (2016) https://doi.org/10.1117/12.2241519

KEYWORDS: Polishing, Silicon carbide, Oxidation, Oxides, Thermal oxidation, Silicon, Surface finishing, Atomic force microscopy, Abrasives, Statistical analysis

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SPIE Journal Paper | 18 October 2016 Open Access

Preliminary study on atmospheric-pressure plasma-based chemical dry figuring and finishing of reaction-sintered silicon carbide

Xinmin Shen, Hui Deng, Xiaonan Zhang, Kang Peng, Kazuya Yamamura

OE, Vol. 55, Issue 10, 105102, (October 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.10.105102

KEYWORDS: Silicon carbide, Surface finishing, Polishing, Surface roughness, Atmospheric plasma, Oxides, Plasma, Silicon, Scanning electron microscopy, Abrasives

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SPIE Journal Paper | 22 October 2015 Open Access

Efficient processing of reaction-sintered silicon carbide by anodically oxidation-assisted polishing

Qunzhang Tu, Xinmin Shen, Jianzhao Zhou, Xiaohui He, Kazuya Yamamura

OE, Vol. 54, Issue 10, 105113, (October 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.10.105113

KEYWORDS: Oxidation, Polishing, Silicon carbide, Oxides, Surface finishing, Surface roughness, Scanning electron microscopy, Silicon, Optical engineering, Abrasives

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SPIE Journal Paper | 22 May 2015 Open Access

Mechanism analysis on finishing of reaction-sintered silicon carbide by combination of water vapor plasma oxidation and ceria slurry polishing

Xinmin Shen, Qunzhang Tu, Hui Deng, Guoliang Jiang, Kazuya Yamamura

OE, Vol. 54, Issue 05, 055106, (May 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.5.055106

KEYWORDS: Polishing, Silicon carbide, Plasma, Surface finishing, Oxides, Silicon, Surface roughness, Scanning electron microscopy, Radium, Oxidation

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