Mr. Xu Huang Profile

Xu Huang

at Nanyang Technological Univ

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Author

Publications (3)

Proceedings Article | 13 November 2002 Paper

Some factors affecting the properties of sputter-deposited NiTi-based shape memory alloy thin films

Xu Huang, Yong Liu

Proceedings Volume 4934, (2002) https://doi.org/10.1117/12.468642

KEYWORDS: Silicon, Argon, Annealing, Thin films, Shape memory alloys, Semiconducting wafers, Chemical species, Crystals, Temperature metrology, Oxygen

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Proceedings Article | 11 July 2001 Paper

RF magnetron sputtered crystalline TiNiCu shape memory alloy thin film

Yongqing Fu, Xu Huang, Hejun Du, Yong Liu

Proceedings Volume 4333, (2001) https://doi.org/10.1117/12.432758

KEYWORDS: Copper, Thin films, Shape memory alloys, Crystals, Argon, Sputter deposition, X-ray diffraction, Nickel, Silicon, Semiconducting wafers

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Proceedings Article | 20 October 2000 Paper

Preparation of crystalline TiNi shape-memory alloy thin film for MEMS applications

Yongqing Fu, Hejun Du, Weiming Huang, Xu Huang, Jianmin Miao, Yong Liu

Proceedings Volume 4230, (2000) https://doi.org/10.1117/12.404895

KEYWORDS: Crystals, Microelectromechanical systems, Thin films, Sputter deposition, Temperature metrology, Shape memory alloys, Nickel, Silicon, Argon, X-ray diffraction

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