Xu Xu
PhD Student at Univ of California San Diego
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 19 September 2016 Paper
Proc. SPIE. 9981, Planetary Defense and Space Environment Applications
KEYWORDS: Telescopes, Space telescopes, Phased arrays, Computer aided design, Space operations, Optical instrument design, James Webb Space Telescope, Phased array optics, Phase shifts, Asteroids

Proceedings Article | 17 October 2008 Paper
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Lithography, Optical lithography, Etching, Manufacturing, Computer programming, Feature extraction, Photomasks, Double patterning technology, Cerium, Overlay metrology

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Reticles, Manufacturing, Photomasks, Dysprosium, Optical alignment, Semiconducting wafers, Prototyping, Chemical mechanical planarization, Wafer dicing, Algorithms

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Lithography, Edge detection, Optical lithography, Detection and tracking algorithms, Metals, Optical proximity correction, Critical dimension metrology, Model-based design, Process modeling, Resolution enhancement technologies

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Reticles, Visualization, Databases, Manufacturing, Photomasks, Algorithm development, Semiconducting wafers, Product engineering, Resolution enhancement technologies, Design for manufacturability

Showing 5 of 10 publications
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