Mr. Xudi Wang Profile

Xudi Wang

at Univ of Science and Technology of China

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Author

Publications (3)

Proceedings Article | 3 February 2009 Paper

Experimental study of roof filling rate during thermal bonding of polymer microchannel sealing

Xudi Wang, Jingjing Lu, Yun Jiang, Liangjin Ge, Shaojun Fu

Proceedings Volume 7159, 71590M (2009) https://doi.org/10.1117/12.807059

KEYWORDS: Polymers, Capillaries, Microfluidics, Scanning electron microscopy, Glasses, Interfaces, Nanolithography, Nanoparticles, Silicon, Polymer thin films

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Proceedings Article | 3 February 2009 Paper

High aspect ratio grating fabrication in SU-8 resist by UV-curing nanoimprint

Xudi Wang, Liangjin Ge, Jingjing Lu, Shaojun Fu

Proceedings Volume 7159, 71590K (2009) https://doi.org/10.1117/12.807006

KEYWORDS: Silicon, Polymers, Nanoimprint lithography, Ultraviolet radiation, Electron beam lithography, Nanophotonics, Glasses, Deep reactive ion etching, Etching, Manufacturing

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Proceedings Article | 7 February 2005 Paper

Reactive ion beam etching of HfO2 film using Ar/CHF3 gas chemistries

Xudi Wang, Xiangdong Xu, Ying Liu, Yiling Hong, Shaojun Fu

Proceedings Volume 5636, (2005) https://doi.org/10.1117/12.573666

KEYWORDS: Etching, Hybrid fiber optics, Photoresist materials, Ions, Ion beams, Argon, Reactive ion etching, Plasma, Chemistry, Hafnium

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