Dr. Xuelian Zhu
Sr. Engineer TD Research at GLOBALFOUNDRIES Inc
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Publications (5)

Proceedings Article | 28 March 2017 Presentation + Paper
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Semiconductors, Lithography, Optical design, Logic, Optical lithography, Manufacturing, Resistance, Capacitance, Extreme ultraviolet lithography, Yield improvement, Design for manufacturability

Proceedings Article | 17 April 2012 Paper
Proc. SPIE. 8352, 28th European Mask and Lithography Conference
KEYWORDS: Mirrors, Defect detection, Inspection, Reflectivity, Scanning electron microscopy, Optical inspection, Photomasks, Extreme ultraviolet, Semiconducting wafers, Defect inspection

Proceedings Article | 14 March 2012 Paper
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Lithography, Optical lithography, Metals, Manufacturing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Immersion lithography, Semiconducting wafers, Overlay metrology

Proceedings Article | 16 February 2009 Paper
Proc. SPIE. 7223, Photonic and Phononic Crystal Materials and Devices IX
KEYWORDS: Diamond, Modulation, Nanoparticles, Silicon, Physics, Photonic crystals, Scanning electron microscopy, Tolerancing, Nanolithography, Diamond patterning

Proceedings Article | 14 February 2009 Paper
Proc. SPIE. 7223, Photonic and Phononic Crystal Materials and Devices IX
KEYWORDS: Lithography, Holography, Silica, Polymers, Crystals, Silicon, Photonic crystals, Distortion, Photoresist materials, Refraction

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