Dr. Xuelong Cao Profile

Dr. Xuelong Cao

at KLA Corp

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Publications (2)

Proceedings Article | 10 May 2005 Paper

Critical dimension uniformity control with combined ellipsometry and reflectometry

Jon Opsal, Jingmin Leng, Xuelong Cao

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.600124

KEYWORDS: Semiconducting wafers, Reflectometry, Thin films, Ellipsometry, Oxides, Reflectance spectroscopy, Line scan image sensors, Dispersion, Diagnostics, Inspection

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Proceedings Article | 24 May 2004 Paper

Contact hole application for lithography process development using the Opti-Probe three-dimensional RT/CD technology

Zhiming Jiang, Osman Sorkhabi, Hanyou Chu, XueLong Cao, Guangwei Li, Youxian Wen, Jon Opsal, Yia-Chung Chang

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.556587

KEYWORDS: Semiconducting wafers, Photoresist materials, Lithography, Finite element methods, Inspection, Oxides, Process control, 3D metrology, Metrology, Critical dimension metrology

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