Dr. Xuelong Shi Profile

Dr. Xuelong Shi

at imec

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Publications (1)

Proceedings Article | 12 November 2024 Presentation + Paper

Unfolding the curves: novel designs and metrology methods for curvilinear masks qualification

Darko Trivković, Xuelong Shi, Yi-Pei Tsai, Chieh-Miao Chang, Jane Wang, Victoria Malacara, Balakumar Baskaran, Youssef Drissi, Joost Bekaert, Kenichi Miyaguchi

Proceedings Volume 13216, 132160I (2024) https://doi.org/10.1117/12.3036470

KEYWORDS: Photomasks, Critical dimension metrology, Metrology, Optical proximity correction, Manufacturing, Semiconducting wafers, Logic, Industry, Industrial applications, Silicon photonics

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