To measure large and heavy micro-structured workpieces in situ and improve the measurement accuracy, which strongly depends on the environment during the measurement of micro-structured surfaces, a workpiece rotating technique is proposed. This method utilizes the precise rotation of machine tools to drive the workpiece and records a set of elemental image arrays for the pickup stage to overcome the upper-resolution limit imposed by the Nyquist sampling theorem, which allows the increase in the two-dimensional spatial resolution of the computed depth images in integral imaging. By extracting the depth position, we can obtain accurate depth information and measurement results for micro-structured surfaces. We carried out simulations and experiments to demonstrate the proposed method, and the results show the feasibility of our method.
A reconstruction method of axially moving lenslet array (AMLA) was proposed. First, the dot-pattern reconstructed image was generated from a set of AMLA-recorded EIs using pixel-to-pixel mapping. Then, the empty pixels of dot-pattern reconstructed image can be filled by the average of the intensity values of all pixels that are corresponding to the empty pixels in each EI and determined through back projection. Using this proposed method, not only can the empty pixels be eliminated, but also the image quality is higher than conventional interpolation. Moreover, the axially moving gap can also be arbitrary, which breaks the limitation of the strict interpolation-free condition of the conventional reconstruction method. The feasibility of this method was verified by simulations and optical experiments.
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