Mr. Yachun Zhang Profile

Yachun Zhang

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Publications (2)

Proceedings Article | 4 May 2015 Paper

Theoretical study on the electron energy distribution function and electron transport parameters of argon plasma

Yachun Zhang, Xiang He, Jianping Chen, Jian Lu, Xiaowu Ni, Zhonghua Shen

Proceedings Volume 9543, 95430Z (2015) https://doi.org/10.1117/12.2182243

KEYWORDS: Electron transport, Plasma, Argon, Diffusion, Particles, Systems modeling, Ion implantation, Plasma enhanced chemical vapor deposition, Ions, Data modeling

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Proceedings Article | 4 May 2015 Paper

Numerical investigation on electrical characterization of a capacitive coupled radio-frequency plasma

H. Yao, X. He, J. Chen, Y. Zhang

Proceedings Volume 9543, 95430Y (2015) https://doi.org/10.1117/12.2182242

KEYWORDS: Plasma, Electrodes, Electron transport, Oxygen, Particles, Diffusion, Dielectrics, Argon, Numerical analysis, Thermodynamics

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