Dr. Yaichiro Watakabe
President at Lasertec Corp
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 5 September 2001 Paper
Proc. SPIE. 4409, Photomask and Next-Generation Lithography Mask Technology VIII
KEYWORDS: Prisms, Phase shifting, Defect detection, Interferometers, Databases, Inspection, Reflectivity, Phase interferometry, Photomasks, Defect inspection

Proceedings Article | 17 May 1994 Paper
Proc. SPIE. 2197, Optical/Laser Microlithography VII
KEYWORDS: Lithography, Etching, Sputter deposition, Transmittance, Photomasks, Excimer lasers, Mask making, Molybdenum, Semiconducting wafers, Phase shifts

Proceedings Article | 8 August 1993 Paper
Proc. SPIE. 1927, Optical/Laser Microlithography
KEYWORDS: Optical lithography, Etching, Magnetism, Chromium, Photomasks, Critical dimension metrology, Reactive ion etching, Plasma, Phase shifts, Protactinium

Proceedings Article | 1 June 1992 Paper
Proc. SPIE. 1674, Optical/Laser Microlithography V
KEYWORDS: Etching, Quartz, Metals, Ultraviolet radiation, Inspection, Chromium, Photomasks, Mask making, Floods, Phase shifts

Proceedings Article | 1 June 1992 Paper
Proc. SPIE. 1673, Integrated Circuit Metrology, Inspection, and Process Control VI
KEYWORDS: Reticles, Phase shifting, Databases, Image processing, Manufacturing, Inspection, Image resolution, Integrated circuits, Data conversion, Phase shifts

Showing 5 of 10 publications
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