It is a key point of CO2 laser beam monitoring in the CO2 laser processing system to achieve alignment between CO2
laser and PL (pointing and launching) system. By monitoring the angle offset of CO2 laser beam, the compensation can
be gotten witch is given to fast-steering mirror to rectify the direction of laser beam. But the normal photoelectric
detector can not get the laser signal because of CO2 laser's high energy and long wavelength. Its wavelength is 10.6μm
and its power can reach kW level. Consequently, it is difficult to detect the high-energy 10.6μm laser beam directly. So,
we monitored the output mirror of laser resonator superseded the laser beam, indirectly. The laser beam monitoring
system could be designed based on CCD laser auto-collimation angular measurement principle and image processing
method. In this paper, application of CCD laser auto-collimation angular measurement principle and image processing
method for CO2 laser beam monitoring system is introduced particularly, After design, fabrication and alignment, the
monitoring system can be used for experimental study that including angular measurement accuracy and angle offset
measurement of CO2 laser beam. Angle offset range and angle variation rule of CO2 laser beam is also can be acquired
for further research.
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