Yandong Luo
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2018 Paper
Proceedings Volume 10588, 105880O (2018) https://doi.org/10.1117/12.2297515
KEYWORDS: Line edge roughness, Metals, Optical lithography, Dielectrics, Extreme ultraviolet lithography, Extreme ultraviolet, Photoresist materials, Stochastic processes, Very large scale integration, Electrons

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