Unspecified Yang-Hun Yoon Profile

Yang-Hun Yoon

at Pohang Accelerator Lab.

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Publications (2)

Proceedings Article | 13 November 2024 Poster

Dry extreme ultraviolet lithography via N-heterocyclic carbene-metal complexes and etchant-free thermal development

Dowon Kim, Sukwon Hong, Jinhwan Byeon, Jaenong Ahn, Sangjin Kim, In-Uk Moon, Huijeong Ryu, Dong Suk Oh, Yang Hun Yoon, Hae-geun Jee, Chan-Cuk Hwang

Proceedings Volume PC13215, PC132150S (2024) https://doi.org/10.1117/12.3034450

KEYWORDS: Photoresist developing, Extreme ultraviolet lithography, Photoresist materials, Extreme ultraviolet, Metals, Optical lithography, Nanotechnology, Nanofabrication, Surface roughness, Standards development

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Proceedings Article | 10 April 2024 Poster

EUV sensitivity and PEB stability of Sn-12 clusters for EUVL

Yeo Kyung Kang, Heeju Kim, Sun Jin Lee, Dong-Seok Oh, Yang-Hun Yoon, Chang-Jun Kim, Geun Young Yeom, Chan-Cuk Hwang, Myung-Gil Kim

Proceedings Volume 12957, 129572D (2024) https://doi.org/10.1117/12.3023154

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Photoresist materials, Tin, Lithography, Nanostructures, Manufacturing, Light absorption, Industry, Etching

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