Yang-Kyu Choi
at Univ of California Berkeley
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 October 2003 Paper
Proc. SPIE. 5220, Nanofabrication Technologies
KEYWORDS: Oxides, Lithography, Electron beam lithography, Silicon, Platinum, Capacitance, Low pressure chemical vapor deposition, Nanoimprint lithography, Systems modeling, Nanowires

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