Yang Liu
at Intel Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 December 2023 Presentation + Paper
Christopher Leavitt, Michael Hunsweck, Florence Eschbach, Yang Liu, Kyle Vogt, Jun Kim, Andrew Sowers, Frank Abboud, Mikael Wahlsten, Robert Eklund, Mats Rosling, Peter Henriksson, Anders Svensson, Fredric Ihren, Youngjin Park
Proceedings Volume PC12751, PC127510T (2023) https://doi.org/10.1117/12.2688097
KEYWORDS: EUV optics, Laser applications, Extreme ultraviolet, Laser development, Critical dimension metrology, Sustainability, Solid state lasers, Solid state electronics, Printing, Power consumption

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