Dr. Yangxi Fu
at TU Dresden
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 2 March 2020 Paper
Proceedings Volume 11268, 1126824 (2020) https://doi.org/10.1117/12.2546211
KEYWORDS: Polymers, Chromium, Diffraction, Nanoimprint lithography, Polymethylmethacrylate, Confocal microscopy, Diffraction gratings, Laser processing

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