Dr. Yanwei Liu Profile

Dr. Yanwei Liu

at KLA-Tencor California

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Author

Publications (9)

Proceedings Article | 6 October 2011 Paper

Assessment of illumination characteristics of soft x-ray laser-based full-field microscopes

Isela Howlett, Fernando Brizuela, Sergio Carbajo, Diana Peterson, Anne Sakdinawat, Yanwei Liu, David Attwood, Mario Marconi, Jorge Rocca, Carmen Menoni

Proceedings Volume 8140, 81400W (2011) https://doi.org/10.1117/12.892927

KEYWORDS: Microscopes, X-rays, Imaging systems, Spatial resolution, X-ray lasers, Diffraction gratings, Image resolution, Modulation transfer functions, Diffraction, Gas lasers

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Proceedings Article | 29 September 2009 Paper

Advances in full field microscopy with table-top soft x-ray lasers

Carmen Menoni, Fernando Brizuela, Yong Wang, Courtney Brewer, Bradley Luther, Francesco Pedaci, Przemeslaw Wachulak, Mario Marconi, Jorge Rocca, Weilun Chao, Erik Anderson, Yanwei Liu, Kenneth Goldberg, David Attwood, Alexander Vinogradov, Igor Artyukov, Yuri Pershyn, Viktor Kondratenko

Proceedings Volume 7451, 74510I (2009) https://doi.org/10.1117/12.826419

KEYWORDS: Microscopes, Zone plates, Extreme ultraviolet lithography, Objectives, Photomasks, Spatial resolution, X-ray lasers, Microscopy, Modulation, Modulation transfer functions

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Proceedings Article | 18 March 2009 Paper

Inspection 13.2-nm table-top full-field microscope

F. Brizuela, Y. Wang, C. Brewer, F. Pedaci, W. Chao, E. Anderson, Y. Liu, K. Goldberg, P. Naulleau, P. Wachulak, M. Marconi, D. Attwood, J. Rocca, C. Menoni

Proceedings Volume 7271, 72713F (2009) https://doi.org/10.1117/12.814320

KEYWORDS: Microscopes, Spatial resolution, Extreme ultraviolet lithography, Zone plates, Photomasks, Extreme ultraviolet, Image resolution, Inspection, Objectives, Modulation transfer functions

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Proceedings Article | 19 February 2008 Paper

Spiral zone plate imaging for soft x-ray microscopy

Anne Sakdinawat, Yanwei Liu

Proceedings Volume 6883, 68830V (2008) https://doi.org/10.1117/12.769892

KEYWORDS: Zone plates, X-ray microscopy, Spiral phase plates, Nickel, X-rays, Image filtering, Microscopy, Objectives, Electron beam lithography, X-ray optics

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Proceedings Article | 23 March 2006 Paper

EUV imaging with a 13nm tabletop laser reaches sub-38 nm spatial resolution

Georgiy Vaschenko, Fernando Brizuela, Courtney Brewer, Miguel Larotonda, Yong Wang, Bradley Luther, Mario Marconi, Jorge Rocca, Carmen Menoni, Weilun Chao, Erik Anderson, Yanwei Liu, David Attwood

Proceedings Volume 6151, 61510X (2006) https://doi.org/10.1117/12.656588

KEYWORDS: Extreme ultraviolet, Zone plates, Spatial resolution, Microscopes, Photomasks, Imaging systems, Extreme ultraviolet lithography, Inspection, Plasma, Reflectivity

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Proceedings Article | 6 May 2005 Paper

Actinic inspection of multilayer defects on EUV masks

Anton Barty, Yanwei Liu, Eric Gullikson, John Taylor, Obert Wood

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598488

KEYWORDS: Inspection, Photomasks, Extreme ultraviolet, Defect inspection, Signal detection, Defect detection, Visible radiation, Light scattering, Scattering, Extreme ultraviolet lithography

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Proceedings Article | 6 May 2005 Paper

A dual-mode actinic EUV mask inspection tool

Yanwei Liu, Anton Barty, Eric Gullikson, John Taylor, J. Liddle, Obert Wood

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598559

KEYWORDS: Photomasks, Zone plates, Extreme ultraviolet, Inspection, Imaging systems, Multilayers, Defect inspection, EUV optics, Microscopes, Semiconducting wafers

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Proceedings Article | 10 November 2004 Paper

High-resolution imaging system using a tabletop extreme ultraviolet source

Xiaoshi Zhang, Daisy Raymondson, Arvinder Sandhu, Sterling Backus, Yanwei Liu, David Attwood, Margaret Murnane, Henry Kapteyn, Ariel Libertun

Proceedings Volume 5534, (2004) https://doi.org/10.1117/12.557379

KEYWORDS: Extreme ultraviolet, Mirrors, Waveguides, Plasmas, Imaging systems, Image resolution, Microscopes, Microscopy, Light sources, High harmonic generation

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Proceedings Article | 12 December 2001 Paper

Focusability of a capillary discharge-pumped soft x-ray laser beam

Yanwei Liu, Jared Caffey, Igor Artioukov, Alexander Vinogradov, Jorge Rocca, David Attwood

Proceedings Volume 4505, (2001) https://doi.org/10.1117/12.450601

KEYWORDS: Mirrors, X-ray lasers, Spatial coherence, Capillaries, X-rays, Optical testing, Wavefronts, Plasmas, Sensors, Spherical lenses

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Showing 5 of 9 publications

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