Mr. Yao-Yuan Chang Profile

Yao-Yuan Chang

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Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper

Global tilt measurement on irregular PIL supporting patterns in 3D NAND memory

Yung-Yi Lin, Tien-Jung Lee, Hsiao-Fei Su, Yen-Hung Liu, Chao-Yu Cheng, Christopher Liman, Boxue Chen, Zhengquan Tan, Ming-Tsung Wu, Min-Hsuan Huang, Yao-Yuan Chang, Hong-Ji Lee, Nan-Tzu Lian

Proceedings Volume 12955, 129552Z (2024) https://doi.org/10.1117/12.3010532

KEYWORDS: Etching, Semiconducting wafers, Metrology, Diffraction, 3D metrology, X-rays, 3D modeling, Silicon nitride, Scanning electron microscopy, X-ray diffraction

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