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Prof. Yas Al-Hadithi
at King Abdulaziz Univ
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Author
Publications (1)
Proceedings Article | 1 September 1991 Paper
100-Hz KrF laser plasma x-ray source
I. C. Edmond Turcu, Malcolm Gower, C. Reason, P. Huntington, M. Schulz, Alan Michette, Fred Bijkerk, Eric Louis, Gregory Tallents, Yas Al-Hadithi, Dimitri Batani
Proceedings Volume 1503, (1991) https://doi.org/10.1117/12.46951
KEYWORDS: X-rays, X-ray sources, Helium, Excimer lasers, Laser systems engineering, Plasma, Optical filters, X-ray imaging, Photoresist materials, X-ray lithography
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