Dr. Yasuo Higashi
at High Energy Accelerator Research Organization
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 15 October 2013 Paper
Proc. SPIE. 8884, Optifab 2013
KEYWORDS: Optical components, Photovoltaics, Mirrors, X-rays, Head, Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotron radiation, Algorithm development, Spherical lenses

Proceedings Article | 18 December 2012 Paper
Proc. SPIE. 8550, Optical Systems Design 2012
KEYWORDS: Photovoltaics, Mirrors, Light sources, Computer programming, Aspheric optics, Extreme ultraviolet, Reconstruction algorithms, Synchrotron radiation, Spherical lenses, Fizeau interferometers

Proceedings Article | 18 December 2012 Paper
Proc. SPIE. 8550, Optical Systems Design 2012
KEYWORDS: Mirrors, Metrology, Sensors, Calibration, Lens design, Optical testing, Ray tracing, Aspheric lenses, Optical alignment, Spherical lenses

Proceedings Article | 15 October 2012 Paper
Proc. SPIE. 8501, Advances in Metrology for X-Ray and EUV Optics IV
KEYWORDS: Photovoltaics, Mirrors, X-ray optics, Spatial frequencies, Interferometers, Calibration, Diodes, Spherical lenses, EUV optics, Fizeau interferometers

Proceedings Article | 4 September 2009 Paper
Proc. SPIE. 7448, Advances in X-Ray/EUV Optics and Components IV
KEYWORDS: Mirrors, X-ray optics, Metrology, Calibration, Error analysis, Humidity, 3D metrology, Aspheric lenses, Spherical lenses, Data analysis

Showing 5 of 10 publications
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