Yasuo Itakura
Researcher at Komatsu Ltd
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 12 May 2005 Paper
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Refractive index, Microfluidics, Transparency, Chemical species, Glasses, Interferometry, Immersion lithography, Fluorine, Semiconducting wafers, Absorption

Proceedings Article | 12 May 2005 Paper
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Prisms, Fringe analysis, Polarization, Interferometers, Laser resonators, Spatial coherence, Immersion lithography, Fluorine, Visibility

Proceedings Article | 28 May 2004 Paper
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Contamination, Laser development, Laser irradiation, Pellicles, Transmittance, Photomasks, Vacuum ultraviolet, Fluorine, Semiconducting wafers

Proceedings Article | 14 May 2004 Paper
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Optical components, Lithography, Contamination, Polymers, Ions, Transmission electron microscopy, Transmittance, Chemical analysis, Natural surfaces, Absorption

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Contamination, Molecules, Laser development, Laser irradiation, Transmittance, Absorbance, Fluorine, Semiconducting wafers, Pulsed laser operation

Showing 5 of 13 publications
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