Dr. Ye Feng Profile

Dr. Ye Feng

Technical Director at Lam Research

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Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper

Scatterometry-based calibration of a 3D virtual fabrication model for gate-all-around devices

Ye Feng, Joseph Ervin, Anthony Woo, Yang Lu, Martyn Coogans, Ivan Chakarov, David Fried

Proceedings Volume 11614, 116140I (2021) https://doi.org/10.1117/12.2582789

KEYWORDS: Process modeling, Calibration, Gallium arsenide, Instrument modeling, 3D modeling, Fin field effect transistors, Transmission electron microscopy, Silicon, Scatterometry, Manufacturing

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Proceedings Article | 24 May 2004 Paper

OCD study of critical dimension and line-shape control of shallow-trench-isolation structures

Beverly Cheung, Xiaodong Zhang, Manabu Hayashi, Zhuan Liu, Mita Isao, Ye Feng

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536582

KEYWORDS: Semiconducting wafers, Silicon, Critical dimension metrology, Photoresist materials, Finite element methods, Dysprosium, Process control, Etching, Semiconductors, Wafer-level optics

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