Mr. Yi-Sheng Su Profile

Yi-Sheng Su

at National Taiwan Univ

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Publications (2)

Proceedings Article | 7 March 2008 Paper

Design of automatic controllers for model-based OPC with optimal resist threshold determination for improving correction convergence

Yi-Sheng Su, Philip Ng, Kuen-Yu Tsai, Yung-Yaw Chen

Proceedings Volume 6924, 69243Z (2008) https://doi.org/10.1117/12.772397

KEYWORDS: Photomasks, Optical proximity correction, Semiconducting wafers, Feedback control, Model-based design, Resolution enhancement technologies, Diffusion, Image processing, Lithographic illumination, Process modeling

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Proceedings Article | 21 March 2007 Paper

Impacts of optical proximity correction settings on electrical performances

Meng-Fu You, Philip Ng, Yi-Sheng Su, Kuen-Yu Tsai, Yi-Chang Lu

Proceedings Volume 6521, 65210W (2007) https://doi.org/10.1117/12.711850

KEYWORDS: Transistors, Optical proximity correction, Device simulation, Image segmentation, Critical dimension metrology, Semiconducting wafers, Lithography, Resolution enhancement technologies, Manufacturing, Design for manufacturability

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