Dr. Yi-Yien Tsai
at DelSolar Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11613, Optical Microlithography XXXIV
KEYWORDS: Lithography, Manufacturing, 3D modeling, Printing, Photomasks, Source mask optimization, SRAF, Molybdenum, Model-based design, Resolution enhancement technologies

Proceedings Article | 16 March 2009 Paper
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Data modeling, Calibration, Image processing, Error analysis, Feature extraction, Scanning electron microscopy, Photomasks, Optical proximity correction, Wafer testing, Process modeling

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