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Dr. YiFang Liu
at Xiamen Univ
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 23 January 2006 Paper
Ni-electroplating of double-width micro-cantilever
Proceedings Volume 6109, 61090L (2006) https://doi.org/10.1117/12.637455
KEYWORDS: Electroplating, Nickel, Metals, Scanning electron microscopy, Microelectromechanical systems, Lithography, Surface finishing, Crystals, Copper, Micromachining
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