Dr. Yigui Li Profile

Dr. Yigui Li

at Shanghai Jiao Tong Univ

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Author

Publications (7)

SPIE Journal Paper | 25 September 2013

Fabricating process of hollow out-of-plane Ni microneedle arrays and properties of the integrated microfluidic device

Jun Zhu, Ying Cao, Hong Wang, Yigui Li, Xiang Chen, Di Chen

JM3, Vol. 12, Issue 03, 033019, (September 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.3.033019

KEYWORDS: Nickel, Microfluidics, Chromium, Copper, Fabrication, Electroplating, Thin films, Semiconducting wafers, Metals, Solids

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Proceedings Article | 20 December 2006 Paper

Microfabrication of PLLA polymer by x-ray lithography

Yigui Li, Susumu Sugiyama

Proceedings Volume 6415, 64150H (2006) https://doi.org/10.1117/12.694855

KEYWORDS: Polymers, X-rays, X-ray lithography, Photomasks, Silicon, Fabrication, Gold, Micromachining, Beryllium, Microfabrication

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Proceedings Article | 30 December 2004 Paper

Two new types of microneedle array fabricated by x-ray lithography

Yigui Li, Susumu Sugiyama

Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.566563

KEYWORDS: X-rays, X-ray lithography, Polymethylmethacrylate, Photomasks, Microfluidics, Skin, Polymers, Helium, Blood, Fabrication

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Proceedings Article | 30 December 2004 Paper

X-ray lithography mask fabricated by excimer laser process

Yigui Li, Susumu Sugiyama

Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.566583

KEYWORDS: Photomasks, Excimer lasers, Laser ablation, X-ray lithography, Gold, X-rays, Laser processing, Fabrication, Mask making, Polymethylmethacrylate

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Proceedings Article | 10 September 2002 Paper

Novel device of passive and fixed alignment of optical fiber using SU-8 photoresist

Jingquan Liu, Bingchu Cai, Jun Zhu, Di Chen, Yigui Li, Jiliang Zhang, Guipu Ding, Xiaolin Zhao, Chunsheng Yang

Proceedings Volume 4928, (2002) https://doi.org/10.1117/12.483159

KEYWORDS: Optical fibers, Optical alignment, Photoresist materials, Silicon, Adhesives, Lithography, Micro optics, Fiber optic communications, Optical switching, Optics manufacturing

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Proceedings Article | 15 October 2001 Paper

DEM microfabrication technique and its applications in bioscience and microfluidic systems

Di Chen, Fan Yang, Min Tang, Yigui Li, Jun Zhu, Dacheng Zhang

Proceedings Volume 4601, (2001) https://doi.org/10.1117/12.444704

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Proceedings Article | 25 August 2000 Paper

Anisotropically etched Si molds for fabricating fine optical components

Yigui Li, Takehiro Fujii, Minoru Sasaki, Kazuhiro Hane

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396473

KEYWORDS: Silicon, Optical components, Reactive ion etching, Fabrication, Optical microcavities, Microfabrication, Optical lithography, Crystals, Etching, Waveguides

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Showing 5 of 7 publications

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