Prof. Yijian Chen
SPIE Involvement:
Author
Publications (38)

Proceedings Article | 22 March 2016 Paper
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Etching, Error analysis, Process control, Photomasks, Critical dimension metrology, Failure analysis, Probability theory, Yield improvement, Phase only filters

Proceedings Article | 16 March 2016 Paper
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Optical lithography, Statistical analysis, Metals, Manufacturing, Feature extraction, Design for manufacturing, Critical dimension metrology, Failure analysis, Optics manufacturing, Probability theory, Yield improvement, Design for manufacturability

Proceedings Article | 16 March 2016 Paper
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Logic, Optical lithography, Electrodes, Metals, Gallium arsenide, Transistors, Field effect transistors, Structural design, Standards development, Nanowires

Proceedings Article | 16 March 2016 Paper
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Lithography, Optical lithography, Cadmium, Detection and tracking algorithms, Etching, Metals, Manufacturing, Printing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Algorithm development, Array processing, Chemical mechanical planarization, Design for manufacturability

Proceedings Article | 16 March 2016 Paper
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Fabrication, Lithography, Optical lithography, Visualization, Manufacturing, Line width roughness, Transistors, TCAD, Yield improvement, Device simulation

Showing 5 of 38 publications
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