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Ying Li
at Chongqing Institute of Metrology and Quality Inspection
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Publications (1)
Proceedings Article | 4 January 2023 Presentation + Paper
Geometric measurement error tests on full information of nanoscale surface with the use of scanning electron microscope
Proceedings Volume 12317, 1231717 (2023) https://doi.org/10.1117/12.2645581
KEYWORDS: Scanning electron microscopy, Electron microscopes, Technology, Standards development, Shape analysis, Error analysis, Transmission electron microscopy, Inspection, Image analysis, Metrology
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