Dr. Yixin Xu
at Tsinghua University
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 December 2013 Paper
Proceedings Volume 9046, 90460T (2013) https://doi.org/10.1117/12.2036314
KEYWORDS: Liquid crystal on silicon, Imaging systems, Relays, CCD image sensors, Charge-coupled devices, Image acquisition, 3D metrology, Image processing, Inspection, Image quality

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