Dr. Yong-Ho Oh Profile

Dr. Yong-Ho Oh

Associate Professor at Wonkwang Univ

SPIE Involvement:

Author

Publications (11)

SPIE Journal Paper | 1 April 2003

Filtering characteristics and grating images of multiphase grating optical low-pass filters

Yong-Ho Oh, Jai-Cheol Lee, Sungwoo Lim, Shi-Ho Kim, Chun-Soo Go

OE, Vol. 42, Issue 04, (April 2003) https://doi.org/10.1117/12.10.1117/1.1554404

KEYWORDS: Diffraction gratings, Optical filters, Linear filtering, Modulation transfer functions, Image filtering, Near field diffraction, Digital cameras, Charge-coupled devices, Optical design, Spatial frequencies

Proceedings Article | 27 December 2002 Paper

Manufacturability evaluation of model-based OPC masks

Sung-Hoon Jang, Sonny Zinn, Won-Tai Ki, Ji-Hyun Choi, Chan-Uk Jeon, Seong-Woon Choi, Hee-Sun Yoon, Jung-Min Sohn, Yong-Ho Oh, Jai-Cheol Lee, Sungwoo Lim

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.468093

KEYWORDS: Photomasks, Optical proximity correction, Inspection, Manufacturing, Model-based design, Vestigial sideband modulation, Optical lithography, Semiconducting wafers, Data conversion, Computer simulations

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Proceedings Article | 29 October 2001 Paper

Grating images of a multiphase grating optical low-pass filter

Chun-Soo Go, Jai-Cheol Lee, Yong-Ho Oh, Sungwoo Lim, Shi-Ho Kim

Proceedings Volume 4594, (2001) https://doi.org/10.1117/12.446575

KEYWORDS: Diffraction gratings, Linear filtering, Near field diffraction, Digital cameras, Charge-coupled devices, Glasses, Zone plates, Cameras, Optical design, Phase shift keying

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Proceedings Article | 29 October 2001 Paper

Computer-generated multiphase hologram for high-resolution image generation

Jai-Cheol Lee, Yong-Ho Oh, Chun-Soo Go, Sungwoo Lim, Shi-Ho Kim

Proceedings Volume 4594, (2001) https://doi.org/10.1117/12.446581

KEYWORDS: Holograms, Computer generated holography, Photomasks, Optical design, Glasses, Binary data, Monte Carlo methods, Visualization, Manufacturing, Image enhancement

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Proceedings Article | 29 October 2001 Paper

Comparison of a grating optical low-pass filter with a birefringent filter

Yong-Ho Oh, Chun-Soo Go, Jai-Cheol Lee, Sungwoo Lim, Shi-Ho Kim

Proceedings Volume 4594, (2001) https://doi.org/10.1117/12.446573

KEYWORDS: Modulation transfer functions, Optical filters, Linear filtering, Moire patterns, Imaging systems, Image resolution, Digital cameras, Digital imaging, Image filtering, Phase shift keying

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Proceedings Article | 14 September 2001 Paper

Optical proximity correction of critical layers in DRAM process of 0.12-um minimum feature size

Yong-Ho Oh, Jai-Cheol Lee, Ki-Chon Park, Chun-Soo Go, Sungwoo Lim

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435699

KEYWORDS: Optical proximity correction, Photomasks, Image processing, Binary data, Optical lithography, Capacitors, Image enhancement, Compact discs, Light sources, Image storage

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Proceedings Article | 26 July 1999 Paper

Resolution enhancement through optical proximity correction and stepper parameter optimization for 0.12-um mask pattern

Yong-Ho Oh, Jai-Cheol Lee, Sungwoo Lim

Proceedings Volume 3679, (1999) https://doi.org/10.1117/12.354373

KEYWORDS: Photomasks, Optical proximity correction, Binary data, Resolution enhancement technologies, Manufacturing, Lithographic illumination, Image resolution, Lithography, Image enhancement, Distortion

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Proceedings Article | 26 May 1995 Paper

Optical lithography technique with dummy diffraction mask for 0.20 um T-shaped gate formation

Byung-Sun Park, Yong-Ho Oh, Sang-Soo Choi, Hai Bin Chung, Hyung Joun Yoo

Proceedings Volume 2440, (1995) https://doi.org/10.1117/12.209310

KEYWORDS: Photomasks, Metals, Lithography, Photoresist processing, Optical lithography, Diffraction, Head, Chromium, Field effect transistors, Electron beams

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Proceedings Article | 26 May 1995 Paper

Base-line error-free non-TTL alignment system using oblique illumination for wafer steppers

Dohoon Kim, Kag Hyeon Lee, Yong-Ho Oh, Jong-Hyun Lee, Hai Bin Chung, Hyung Joun Yoo

Proceedings Volume 2440, (1995) https://doi.org/10.1117/12.209318

KEYWORDS: Optical alignment, Semiconducting wafers, Signal detection, Diffraction, Excimer lasers, Helium neon lasers, Laser systems engineering, Imaging systems, Optical scanning systems, Mirrors

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Proceedings Article | 17 May 1994 Paper

Zone-by-zone optimization of the dummy diffraction mask with auxiliary phase gratings

Yong-Ho Oh, Byung-Sun Park, Hai Bin Chung, Sang-Soo Choi, Seong-Hak Choi, Hyung Joun Yoo, Sin-Chong Park

Proceedings Volume 2197, (1994) https://doi.org/10.1117/12.175415

KEYWORDS: Photomasks, Diffraction gratings, Diffraction, Lithography, Optical lithography, Electronics, Telecommunications, Optical design, Indium arsenide, Resolution enhancement technologies

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Proceedings Article | 8 August 1993 Paper

New mask technique for optical lithography--dummy diffraction mask

Yong-Ho Oh, Hyung Joun Yoo, Byung-Sun Park, Zion Cha, Hyo-Joong Kim, Young Jin Jeon

Proceedings Volume 1927, (1993) https://doi.org/10.1117/12.150425

KEYWORDS: Photomasks, Optical lithography, Diffraction, Diffraction gratings, Projection systems, Lithography, Resolution enhancement technologies, Semiconducting wafers, Light sources, Spatial frequencies

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Showing 5 of 11 publications

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